Semicore Introduced Their new Bench-Top Sputtering Systems.

SC250-450Semicore introduced the new Bench-Top Sputtering systems Model SC 250/450.

These systems are fully automated, with features normally found in bigger models:

  • Can process small parts up to 200mm substrates (SC450).
  • Substrate Rotation
  • Turbo Pumped
  • Load-Lock option
  • Co-Sputtering
  • All in a very small foot print: 57x51cm (SC 250)

 

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New Affordable Ellipsometers from Film Sense

ATSL is happy to announce the representation of Film Sense, USA, in Israel.

We offer the FS-1 Banded Wavelength Ellipsometer for thin films accurate measurements.

The FS-1 is an easy to use, affordable and highly advanced Banded Wavelength Ellipsometer for determine thin films thickness, index of refraction, surface roughness and film composition.

Can be configured for In Situ measurements, applicable to most thin film deposition techniques: Sputtering, ALD, MBE, MOCVD, e‑beam evaporation, etc.

 fs-1 banded wavelength ellipsometer

The system uses Long lifetime (>50,000 hours) Multiple LED as light sources.

No moving parts in the ellipsometric detector- Fast and reliable measurement (banded wavelength data in 10ms) and long term reliability.

Excellent thickness precision- better than 0.001nm for many samples (for a 1 second acquisition), even for sub-monolayer film thicknesses.


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New Mapping Ellipsometers from Film Sense

Film Sense is pleased to announce the FS-XY150 and FS-RT300 automated film thickness mapping systems.

These products combine an FS‑1™ Multi-Wavelength Ellipsometer with compact mapping stages to provide fast, accurate, and reliable film thickness uniformity measurements across a wafer.

The FS-XY150

  • Typical time for wafer map: 60 seconds (49 points on a 150 mm diameter wafer).
  • Compact footprint: 600×600 mm, 16 kg
  • Stage travel (X,Y): 150 x 150 mm, resolution: 5 μm

fs-xy150fs-1-contour-graph

The FS-RT300

  • Typical time for wafer map: 90 seconds (49 points on a 300 mm diameter wafer)
  • Compact footprint: 400×500 mm, 22 kg
  • Stage travel: R (linear) 150 mm, resolution: 12 μm
  • Theta (rotation) 360°, resolution: 0.1°

 

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Features and Specifications

  • 4  wavelengths of ellipsometric data ((465, 525, 580, 635, with long life LED sources, and no moving parts detector.
  • Accurate thickness measurements for most transparent thin films from 0 – 1000 nm
  • Typical thickness repeatability: 0.015 nm
  • Integrated focusing probes, standard spot size: 0.8 x 1.9 mm (other spot sizes available).
  • Optional USB Camera to visualize beam location on the sample.
  • Motorized Z-stage for sample auto-alignment.
  • Flexible Scan Pattern Editor.
  • Contour plots of measured parameters.

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Arradiance Representation in Israel.

Since May 2012 ATSL represents Arradiance Inc. In Israel. Arradiance specilized in the production of Bench-Top Atomic Layer Deposition (ALD) and Annealing Systems. Arradiance Inc. is American company located in MA.

Arradiance ALD systems deposit low temperature, conformal metal, semiconductor and insulating films on planar and high aspect ratio (HAR) structures. They are designed for uniform conformal growth of films from precursors that have a CVD growth component. The uniformity of thin films can determine whether a process or device works, the system is designed to provide the user with the most uniform films possible, even in challenging HAR through-hole applications.

 

 

PhaseView Representation in Israel.

ATSL is pleased to announce the representation of PhaseView In Israel. PhaseView systems can perform 3D Digital Imaging, roughness and step height measurements with Fast and precise Nano Z-Scanning at affordable price.

You can choose between upgrades to your optical microscope or we can offer to you a complete system, tailored to your application.

Now, you can turn your optical microscope into advanced measurement tool, using easy to use software, adding the following capabilities to your microscope:

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  • Z-Stacking - Extended Depth of Field – Fusion Image - 3D image
  • Multiple Imaging Modes: Brightfield, Darkfield, DIC , Phase Contrast
  • Z-Depth - 3D surface Metrology – Roughness – Step heights
  • ISO Roughness measurements
  • Remote Focusing – Auto-Focus

 3d imageprofile

 

 

 

SemiconSoft Representation in Israel

ATSL is pleased to announce the representation of SemiconSoft In Israel. 

SemiconSoft offer cost effective, high resolution, thin film measurement instruments, in the range of 1nm to 1mm.

These systems are easy to operate and offer maximum flexability and custome configurations formprobe microspot specific applications.

Typical Applications:

  • Oxides, nitrides, semiconductors, photoresists
  • Thin-film solar cells
  • Adhesives
  • LCD and touch screens
  • Thin metals (up to 40nm)
  • Hard coatings
  • Biomedical coatings
  • Polymer layers
  • Polymer web

 

 

 

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