Direct Write Photolithography

We offer D.M.O MicroWriter ML3, a compact and high performance direct write photolithography machine, forml3
rapid prototyping in R&D.

This new generation machine is faster than ever before, thanks to the new exposure concept using LED light source, accurate Interferometer stage for high accuracy, on the fly selection of high resolution down to 0.6 microns and low resolution of 5 microns for big features exposures on the same job. Suitable for wafers up to 200mm and can process dies as well.

Many advanced features are offered as standard including:

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