Apollo Plasma Stripper
The Apollo is a compact, inexpensive and versatile Photo resist striping system, which can handle 100-300mm wafers. By employing either ICP or microwave and RF bias power as needed, difficult to remove layers of resist can be removed at low temperatures.
Important System Features:
- Etch rates up to 6um/min
- 100mm to 300mm wafers
- High throughput
- Small footprint
- Low plasma damage
- Competitively priced
- Self-tuning
