GEMINI Multi-Chamber Plasma Stripper
The Gemini is the most compact, inexpensive and versatile system, which can handle 100-300mm wafers. This multi-chamber, high throughput stripping system is designed specifically for the demands of today's production fabs.
Important system features:
- 100-300mm wafers
- High throughput stripping system
- Employing ICP
- Microwave and RF bias power as needed
- Etch rates up to 6um/min
- High throughput
- Low plasma damage
- Self tuning
- Small footprint
- Competitively priced