Annealing Systems

arradiance gamstar aGEMSTARTM Benchtop Annealling system anneals substrates in a vacuum controlled user selectable gas environment.

The system is designed to provide the user with the most uniform films possible even in challenging high aspect ratio through-hole applications.

Precise films require state-of-the-art controls. Arradiance system maintains control over key parameters
such as exposure, purge, background pressure and temperature at all zones.

Some key features of the system include:


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