Apollo Plasma Stripper

The Apollo is a compact, inexpensive and versatile Photo resist striping system, which can handle 100-300mm wafers. By employing either ICP or microwave and RF bias power as needed, difficult to remove layers of resist can be removed at low temperatures.

Important System Features:

• Etch rates up to 6um/min
• 100mm to 300mm wafers
• High throughput
• Small footprint
• Low plasma damage
• Competitively priced
• Self-tuning

 

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