AutoGlow Plasma Barrel System

AutoGlow Plasma Barrel SystemThe AutoGlow plasma barrel system is equipped with variable 10 to 300 Watt solid state generator, at 13.56MHz with automatic RF tuning. 

A tabletop plasma system that provides extremely efficient plasma for lab or production applications. Used for argon plasma, oxygen plasma, plasma coating, PDMS, oxygen plasma treatment, photo resist stripping, FA applications, Parylene removal, organic removal and lab use.

Up to three (3) process gasses can be connected to
a gas control module (GCM) providing process recipe flexibility.

The system has digital pressure readout.

Chamber size of up to 160mm diameter and 187mm deep.

 

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