Plasma Enhanced Chemical Vapor Deposition (PECVD)

Plasma Enhanced Chemical Vapor Deposition (PECVD)

We offer the Trion Technology Inc. Plasma Enhanced Chemical Vapor Deposition (PECVD) systems. Trion manufactures a wide variety of systems for the R&D, Compound Semiconductor, MEMS, Opto-Electronic and other markets. Trion PECVD systems feature the smallest footprint and lowest cost in the industry with proven production reliability.

Orion iii PECVD System

Orion iii PECVD

Minilock-Orion iii PECVD

Minilock-Orion III PECVD with Loadlock

Titan- Loadlocked PECVD with Vacuum Cassette Elevator

Titan- Loadlocked PECVD with Vacuum Cassette Elevator

Oracle iii - Production PECVD/RIE

Oracle iii - Production PECVD/RIE

 

 

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