In- situ plasma Asher/ cleaner

In-Situ Plasma Ashers

ibss Group, in collaboration with a plasma source inventor, has designed a sophisticated in situ downstream Asher- The GV10x.

The Asher can be used across TMP operating pressure ranges without any risk of damaging the vacuum system.

With the addition of the Gentle Asher™ chamber, it is possible to clean samples and sample holders safely with no heat damage.

Using the downstream process, the GV10x effectively and evenly reduces carbon and hydrocarbons by as much as 10 to 20 times more effectively than competitive units.

Standard GV10x DS plasma is driven with oxygen or air to oxidize hydrocarbon impurities. Experimental results performed on synchrotron and NIST laboratories demonstrate that DS hydrogen plasma is safe and effective for eliminating carbon residue on multilayer mirrors. The GV10x Asher can be integrated with a number of laboratory tools. Unlike other plasma cleaners, the DS process eliminates sample heating, sputter damage and kinetic impingement.

The GV10x provides an ultimate solution for cleaning chambers. In contrast to other standard techniques, the GV process quickly and effectively removes impurities even from the far corners of surfaces which can potentially desorb hydrocarbon contamination. Additionally, with more options of pressure and power, the GV10x can be used for cleaning EUV and synchrotron optics.

 Key Features: gv10x

  • Quickly and effectively reduces carbon and hydrocarbons
  • Does not cause sample heating, sputter damage, or kinetic impingement
  • Wide operation pressure(2 Torr to <5 mTorr). can be operated across TMP operating pressure  ranges without affecting the vacuum system.
  • Wide power range (5 to 99 Watts)
  • Cost effective 


Typical applications of the GV10x DS Asher are: 

gv10x asher- Hydrocarbon de-contamination of FIB, CDSEM, SEM, TEM
- Cleaning EUV and synchrotron optics
- Suitable for heavily contaminated surfaces and large
  volume chambers 






Gentle Asher™ GV/GA- Samples and sample holders Cleaning system

The Gentle Asher extends the GV10x capability to clean specimens before insertion into the vacuum chamber. The Gentle Asher™ Chamber with a GV10x connected, GV/GA, is well suited for preventing black scan square buildup.gvga system

After decontamination of an EM chamber to acceptable hydrocarbon levels, one can utilize the DS process for samples' and sample holders' cleaning and storage by simply moving the GV10x Source onto the Gentle Asher Chamber. Reports from customers show that this cost effective combination delicately removes contamination from TEM holders and any type of sample, with less damage, while keeping hydrocarbons levels manageable in CDSEM, SEM, FIB and TEM.

Pre-cleaning samples and holders prevents contaminating the chamber and prolongs the service interval of the microscope.

The system is compatible with all of the major TEM manufacturers sample holders.


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