Optical Profilers

Optical Profilers

We offer GBS Metrology, Germany, range of non-contact optical measurement instrumentation for production, in-line and R&D applications. 

Technology is based on powerful fast white light interferometry (WLI). 

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Wide range of instruments tailored to your application, with automated measurements procedures for ease of use and repeatable accurate measurements at the highest resolution.

GBS Metrology offers systems that capture sub nanometre structures with the highest accuracy in real time. 

The Speedytec technology offers GPU-based fast data processing (100x faster compared to CPU processing).

    • Exceptional height resolution, down to 0.05nm, and lateral resolution of 400nm.
    • Extended acceptance angle providing ability to record highly inclined surface areas.
    • Measuring tasks can be automated by integrating the measuring systems into production environments.
    • Large sample area inspection at high resolution, using Smartstitch technology.

Typical applications are topography and flatness, roughness measurements, film thickness measurements and defects detection in: Semiconductors, optics and micro optics, MEMS, Medical technology and biomedicine, Mechanical engineering and toolmaking, Additive manufacturing & 3D printing.

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Please find below the links to GBS Metrology product line:

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      WLI SENSORS

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      WLI SCAN SYSTEMS

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WLI WAFER SCAN SYSTEMS

 

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