Titan - Loadlocked PECVD with Vacuum Cassette Elevator
The Titan - Loadlocked PECVD with Vacuum Cassette Elevator is a very compact, fully automated, vacuum loadlocked plasma system for semi-conductor production.
Used for advanced processing of wafers or mounted parts. It also has multiple size batch capability. Small footprint at an affordable price.
Typical applications: Silicon dioxide, Silicon Nitride, Oxynitride, and various other materials.
