Titan- Loadlocked RIE with Vacuum Cassette Elevator

Ttitan- Loadlocked RIE with Vacuum Cassette Elevator

The Titan- Loadlocked RIE with Vacuum Cassette Elevator is a very compact, fully automated, vacuum loadlocked plasma system for semi-conductor production.

The system features High Density Inductive Coupled Plasma (HDICP) for RIE applications. Used for advanced processing of wafers or mounted parts. It also has multiple size batch capability.

The system has small footprint at an affordable price.

 

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