Articles
New Mapping Ellipsometers from Film Sense
Film Sense is pleased to announce the FS-XY150 and FS-RT300 automated film thickness mapping systems.
These products combine an FS‑1™ Multi-Wavelength Ellipsometer with compact mapping stages to provide fast, accurate, and reliable film thickness uniformity measurements across a wafer.
The FS-XY150
- Typical time for wafer map: 60 seconds (49 points on a 150 mm diameter wafer).
- Compact footprint: 600×600 mm, 16 kg
- Stage travel (X,Y): 150 x 150 mm, resolution: 5 μm
The FS-RT300
- Typical time for wafer map: 90 seconds (49 points on a 300 mm diameter wafer)
- Compact footprint: 400×500 mm, 22 kg
- Stage travel: R (linear) 150 mm, resolution: 12 μm
- Theta (rotation) 360°, resolution: 0.1°
Features and Specifications
- 4 wavelengths of ellipsometric data ((465, 525, 580, 635, with long life LED sources, and no moving parts detector.
- Accurate thickness measurements for most transparent thin films from 0 – 1000 nm
- Typical thickness repeatability: 0.015 nm
- Integrated focusing probes, standard spot size: 0.8 x 1.9 mm (other spot sizes available).
- Optional USB Camera to visualize beam location on the sample.
- Motorized Z-stage for sample auto-alignment.
- Flexible Scan Pattern Editor.
- Contour plots of measured parameters.